Paul F. Petric
Feb. 10, 1950-Jan. 28, 2026
Pleasanton, California

The semiconductor industry mourns the loss of a prime innovator and influential mentor with the passing of Paul F. Petric of Pleasanton, CA. Paul slipped away peacefully on the afternoon of January 28, 2026 at San Ramon Regional Medical Center following a series of medical setbacks. Mr. Petric was a pioneering figure in the field of electron-beam lithography and charged-particle optics. His innovative thought and development were key to the advancement of semiconductor manufacturing and nanoscale imaging technologies. Over the course of his career he held engineering and inventor roles at leading technology organizations inclusive of Texas Instruments,Dallas, TX; Varian Associates, Gloucester and Lexington, MA; IBM, East Fishkill, NY and KLA-Tencor Corporation, San Jose, CA where his work consistently pushed the boundaries of precision patterning and electron-optical system design. A prolific pacesetter and visionary, Paul was listed as an inventor on more than 30 patents spanning the 40 years of his career. His contributions encompassed breakthroughs across the technology, influencing next-generation lithography strategies continuing to shape the tools and techniques used in chip manufacturing today. In addition to his technical brilliance, Paul was possessed of a generous and collaborative spirit, playing key roles across multidisciplinary teams. He was a highly regarded and inspirational mentor to many, appreciated for his candid input and feedback as well as his willingness to share knowledge. His presence in the technology community will be sorely missed. Paul was born on February 10, 1950 in Cleveland, OH, to the late Stanley V. Petric and Mildred A. Petric (nee, Lesko) and raised in Phoenix, AZ where he was graduated from Camelback High School in 1968. He was a 1973 graduate of Arizona State University earning Bachelor of Science degrees in both Physics and Mathematics. Mr. Petric is survived by his beloved and devoted wife of 40 years, Janet-marie Persico; sisters, Peggy DoVico (Gregory) and Marion Ibsen (Daniel) in addition to loving and cherished nieces and nephews and several grand nieces and nephews inclusive of Janet-marie’s family. A Mass of Christian Burial will be celebrated at a later date. Memorial remembrances in Paul’s name may be made to St. Jude Children’s Research Hospital in Memphis, TN; www.stjude.org.